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Method of manufacturing semiconductor chips

and SF6 gas is supplied from the SF6 gas source 17C into the process chamber 15 while the process chamber 15 is evacuated by the evacuation unit 18

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HGC SF6 Gas Evacuation & Refill Unit of item 52795093

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System and method for detection of a biological condition

After evacuation, valve 44 of evacuation port 42 is closed, and valve such as helium, and/or a calibration gas, such as SF6, is combined


evacuation chamber; - evacuation of said chamber; - introducing a gas SF6, CFC, hydrocarbons, CO2, air, oxygen, silicon compounds, silanes,

Insulator material and method for manufacturing thereof

gas molecule selected from the group of N2, CO2, SO2 and SF6 to pass and therefore does not allow an evacuation after having embedded the


200815-Thereafter, a reactive gas (such as SF6 gas) is introduced into the followed by the evacuation of the chamber to a vacuum, simultaneous

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TDR 7966889 - Sf6 Gas Filling And Evacuation System As Per

TDR 7966889 - Sf6 Gas Filling And Evacuation System As Per Annexure A , DueDate: 10/08/2015 ,TenderValue: 0 , Location: Madhya Pradesh - India P

incorporating compressive heating of reactive gases

After evacuation, a treatment gas is rapidly injected into the reaction group consisting of carbon dioxide, SF6, nitrogen, dry air, argon, helium

Isotropic dry cleaning process for noble metal integrated

gas including a reactive halide composition, e.g., XeF2, SF6, SiF4, Si2evacuation is less than or equal to 50 mTorr, the cleaning gas is at


at each corner of the evacuation chamber to edge distribute gas from theethane (C2F6), octafluoropropane (C3F8), and sulfur hexafluoride (SF6)

Metal clad, medium voltage switchgear

SF6 gas. Shells are vertically divided, the halves (1',2',3') next (64) for evacuation of said gas in the event of a fault in said

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Power breaker

The evacuation volume 18, which is filled with insulating gas under pressure, preferably SF6 gas, is enclosed by the carrier 8, a cylindrically designed

Plasma display

and a discharge gas filled between said first is divided into 6 subfields (SF1 to SF6) an impure gas evacuation path is formed

Sulfur hexafluoride (SF6): global environmental effects and

gas toxicity; contaminants should be systematically considered during maintenance, chamber evacuation and system opening process; small SF6 quantities leaking

Etching method

gas is sulfur hexafluoride (SF6) gas and the silicon fluoride gas is and an evacuation device 12 is connected to the air exhaust 11 via an

hexafluoride (SF 6 ) recovery from SF 6 and N 2 gas

2011111- The separation/concentration of SF6, a strong greenhouse gas, of 1.3% desorption temperature and evacuation time on the PTSA performanc

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Product Details of Mobile Sf6 Gas Filling & Evacuation Device, HDQC60, Mobile Sf6 Gas Filling & Evacuation Device can vacuum SF6 apparatus, then fill

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Fast (tens to hundreds of eV) neutral beams for materials

The SF6 based neutral beam resulted in a silicon undercut because of the gas, excess etchant evacuation, beam irradiation to remove the top layer

Extreme ultra violet light source apparatus

and the SF6 gas is collected into the gas discharging nozzle 47 by using a vacuum evacuation pump, and thereby, a gas curtain 45 of SF6 is generated

Manufacturing method thereof of an optical fibre

2002720-while flowing a dry gas in the through-holes 9is subjected to reduced pressure for evacuationing by introducing SF6 into the through-h

Method of producing optical fiber preform, and optical fiber

When the evacuation and the gas introduction are conducted alternately at hexafluoride (SF6), fluorocarbon (C2F6), and silicon tetrafluoride (SiF4)

Magnetic disk and method of making thereof

fluorine compound gases such as SF6 and CHF3, which are reactive to glassEspecially, when evacuation steps are involved before or after the dispersion

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Architecture of an energy evacuation station of an

(530) of each phase in contact with the ground covers an area near an energy evacuation platform (1) and does not balances track areas of buried